Reliability overview of RF MEMS devices and circuits

This paper outlines the reliability properties of RF MEMS devices and circuits. The tools used to evaluate the reliability properties are presented. Results are shown on both moveable and non moveable devices. Key parametrers that drive the reliability are pointed out : stress, roughness, temperature dependance, dielectric properties. Finally, it is presented some solutions to improve the reliability performance of these devices in term of technology and design.