Old Web
English
Sign In
Acemap
>
Paper
>
Compound laser chemical vapor deposition: varlation of composition and microstructure with process parameters
Compound laser chemical vapor deposition: varlation of composition and microstructure with process parameters
1985
F. Shaapur
S M Copley
S. D. Allen
Keywords:
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Physics
Thin film
Electron beam physical vapor deposition
Analytical chemistry
Combustion chemical vapor deposition
Pulsed laser deposition
Optics
Plasma-enhanced chemical vapor deposition
Deposition (phase transition)
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
2
References
0
Citations
NaN
KQI
[]