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Application of in-line, non-destructive electrical metrology in the evaluation of the effect of pre-gate clean
Application of in-line, non-destructive electrical metrology in the evaluation of the effect of pre-gate clean
2006
Pui Yee Hung
Louison Tan
Joel Barnett
Robert J. Hillard
Chadwin D. Young
Alain C. Diebold
Keywords:
Metrology
Nanotechnology
Electronic engineering
Materials science
non destructive
Correction
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