The effects of offset on quality factor of MEMS wine-glass resonator

The effects of the offset on the performance of MEMS disk resonator have been analyzed first, then considering the special construction of the MEMS wine-glass resonator, the computing equation of the quality factor has been obtained after establishing the disk-electrode modal. And its accuracy has been demonstrated through a comparison between the standard value and the computation value. Finally, using the equation to calculate the quality factor of different offset situations and then analyzing the results, it is found that the quality factor has degradation with an increase in the offsets, for example, an offset of 50% in the disk results in 35.3% degradation in the quality factor.