Challenges and Solutions of Scaling Down Technology in Micron and Nanometer

The scaling down technology of transistors has been the primary factor driving i mprovement of IC. This paper highlights the main challenges of IC technology sca ling in deep sub-micron and nanometer, which come from lithography, transistor scaling, sub-threshold leakage, interconnect scaling, power dissipation, platfo rm integration etc. Then some solutions to these challenges are proposed tech nique, device, circuit, design, and so on.