Sliding Mode-Based Robust Control for Piezoelectric Actuators with Inverse Dynamics Estimation

This paper presents an improved control approach to be used for piezoelectric actuators. The proposed approach is based on sliding mode control with estimation perturbation (SMCPE) techniques. Also, a proportional–integral–derivative (PID)-type sliding surface is proposed for position tracking. The proposed approach has been studied and implemented in a commercial actuator. A model for the system is introduced, which includes the Bouc–Wen (BW) model to represent the hysteresis, and it is identified by means of the System Identification Toolbox in Matlab/Simulink. Experimental data show that the proposed controller has a better performance when compared to a proportional-integral (PI) controller or a conventional SMCPE in motion tracking. Furthermore, a sub-micrometer accuracy tracking can be obtained while compensating for the hysteresis effect.