In situ Testing of Mechanical Properties of Materials11Figures 1–3 and Table 1, plus similarities in this Chapter are reproduced with permission of MRS Journal of Materials Research.

In this chapter, the peculiarities of integrating micro-/nano-materials testing within a scanning electron microscope are addressed. The mostly popular techniques are described, including miniaturized tensile tests, compression tests, and nano-indentation tests. Then the subject of image analysis is addressed and, finally a case study combining the use of compressive and tensile testing methods is presented.