Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe

An insight into surface chemical reactions responsible for organometallic vapor phase epitaxial growth of ZnSe under alternate supply of diethylzinc and dimethylselenium was provided by findings in laser-assisted free-radical doping experiments. Based on ab initio molecular orbital analyses, atmosphere-sensitive characteristics of the ZnSe growth were attributed to differences in the pathways and the corresponding adiabatic potential barriers between diethylzinc chemisorption onto hydrogen- and methyl-terminated Se-stabilized ZnSe surfaces.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.