Green/Blue Photoluminescence from Nanocrystalline Si Thin Films by Rapid Thermal Processing

The green/blue photoluminescence with peaks centered around 2.4 eV at room temperature was observed from nanocrystalline Si thin films prepared by the three-step rapid thermal annealing of hydrogenated amorphous silicon films. The effect of the parameters of rapid thermal annealing on the light emission was studied. A comparison of photoluminescence feature between the films from the rapid thermal annealing and the furnace annealing of a-Si:H has been carried out.