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Transparent conducting thin film

2013 
The invention provides a transparent conducting thin film of an oxide-metal-oxide sandwich structure on the basis of the principle of an induction transmission optical filter in thin film optics. The transparent conducting thin film is used as electrodes (containing a source electrode, a drain electrode and a grid electrode) of an IGZOTFT. Oxide layers of the transparent conducting thin film are IGZO and manganite composite layers. A metal layer is made of metal Cu. Manganite is located between the metal Cu layer and the IGZO layer, the adhesion of the Cu layer and the adhesion of the IGZO layer are increased, and Cu is prevented from diffusing to the IGZO layer. When transparent conducting thin film is used as the source electrode, the drain electrode and the grid electrode of the IGZOTFT, the transparent conducting thin film and an active layer of the IGZOTFT can form ohmic contact with the low contact resistance, so that the IGZOFT has the good light permeability and electrical characteristics.
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