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Post-Discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source
Post-Discharge Study of Laser-triggered Vacuum Discharge for Highly Repetitive Powerful EUV Source
2012
Peng Lu
Takashi Sakugawa
Hidenori Akiyama
Seiya Kitajima
Sunao Katsuki
Keywords:
Computer security
Computer science
Optoelectronics
Laser
Extreme ultraviolet lithography
post discharge
Optics
Correction
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