CW emission at 193 nm using an all solid-state laser source

We report on the realization of a narrow-band continuous-wave laser source in the deep-ultraviolet. Via two consecutive second-harmonic processes starting from a near-infrared diode laser system, we demonstrate an output power of more than 15 mW at 193 nm. The setup is capable of mode hop-free frequency tuning over a range of 100 GHz und coarse tuning over more than 5 nm. We see direct applications of this laser source in the fields of semiconductor metrology and high-resolution spectroscopy in the deep-ultraviolet.