Old Web
English
Sign In
Acemap
>
Paper
>
Micro-fabrication on Glass Surface Using Micro-indentation and Wet Etching Process
Micro-fabrication on Glass Surface Using Micro-indentation and Wet Etching Process
2009
Yasuhiro Saito
Takeshi Hidaka
Keywords:
Dry etching
Etching (microfabrication)
Reactive-ion etching
Composite material
Indentation
Materials science
micro indentation
micro fabrication
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]