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Micromachining apparatus and method
Micromachining apparatus and method
1996
Masahiro Fujisawa-shi Hatakeyama
Yotaro Hatamura
Katsunori Ichiki
Masaaki Kajiyama
Takao Kato
Masayuki Nakao
Takashi Tsuzuki
Keywords:
Surface micromachining
Materials science
Electronic engineering
Optoelectronics
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