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Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
2016
Jae Eun Kim
Kyung Dong Lee
Yoonmook Kang
Hae Seok Lee
Donghwan Kim
Keywords:
Silicon nitride
Solar cell
Passivation
Plasma-enhanced chemical vapor deposition
Nitride
Silicon
Inorganic chemistry
Materials science
Optoelectronics
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