Carbon‐Based Coatings Production By Arc Plasma

Carbon‐based coatings were produced by arc plasma for physical vapor deposition starting from HOPG (High Oriented Pyrolitic Graphite) target. The coatings were deposited on substrates of silicon (100) and (110) a temperature of 46°C. XRD spectra and AFM images were taken on samples, further the plasma was characterized by OES. The low temperature of deposition process allows its employ in a wide range of applications.