Power decoupling with integral capacitors and area array connections

Power and ground decoupling is typically accomplished using a hierarchy of discrete capacitors in the power distribution network. As operating frequencies increase, the use of decoupling capacitors integrated in the substrate becomes more pressing. We present a partial element equivalent circuit (PEEC) based modeling approach especially suited for such integrated capacitors, together with TDR and high-frequency S-parameter measurement, and model validation via use of specially fabricated test structures.