A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope
2014
The authors are expanding the capabilities of the SHARP microscope by implementing complementary imaging modes.
SHARP (the SEMATECH High-NA Actinic Reticle review Project) is an actinic, synchrotron-based microscope
dedicated to extreme ultraviolet (EUV) photomask research. SHARP’s programmable Fourier Synthesis Illuminator and
its use of Fresnel zoneplate lenses as imaging optics provide a versatile framework, facilitating the implementation of
diverse modes beyond conventional imaging. In addition to SHARP’s set of standard zoneplates, we have created more
than 100 zoneplates for complementary imaging modes, all designed to extract additional information from photomasks,
improve navigation and enhance defect detection. More than 50 new zoneplates are installed in the tool; the remaining
lenses are currently in production. In this paper we discuss the design and fabrication of zoneplates for complementary
imaging modes and present image data, obtained using Zernike Phase Contrast and different implementations of
Differential Interference Contrast.
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