Efficient single-drive push-pull silicon Mach-Zehnder modulators with U-shaped PN junctions for the O-band

We demonstrate silicon Mach-Zehnder modulators with efficient (V π L = 0.46Vcm at a bias of −0.5V) and low-loss phase-shifters for the O-band. A 2-mm long device had a 3-dB bandwidth of 13 GHz and supported 24Gb/s modulation.