Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves

T. Zengerle,J. Joppich,P. Schwarz,Abdallah Ababneh,Hans-Peter Seidel

Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves

2020

T. Zengerle
J. Joppich
P. Schwarz
Abdallah Ababneh
Hans-Peter Seidel

Abstract This paper investigates the damping behavior of a vibrating micro-oscillator caused by a surrounding gas in the transitional flow regime (0.01

Keywords:

Microelectromechanical systems
Engineering
Electronic engineering
Flow (psychology)
Thermal
Oscillation
Mechanics

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