Controlling patterning of polymeric surfaces during flexible fabrication with excimer laser

In this paper we present results obtained with a ComPEX 205 KrF laser and an optical system that assures a working precision of 1urn. Our main research area is the improving the parameters of microfabrication of the polymers used in the new generation of microelectronics. We try to obtain better results by understanding the chemical mechanism oflaser-polymer interaction.