Old Web
English
Sign In
Acemap
>
Paper
>
Buried stacked capacitor cells for 16M and 64M DRAMS
Buried stacked capacitor cells for 16M and 64M DRAMS
1990
Dietl
DoThanh
Kusters
Kusztelan
Mulhoff
Muller
Stelz
Keywords:
Optoelectronics
Dram
Transistor
Logic gate
Silicon
Capacitor
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]