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Correction to “ Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth”
Correction to “ Real-Time Carbon Content Control for PECVD ZrO $_2$ Thin-Film Growth”
2004
Dong Ni
Yiming Lou
Panagiotis D. Christofides
Lijie Sha
Shihong Lao
Jane P. Chang
Keywords:
Nanotechnology
Thin film
Carbon
Plasma-enhanced chemical vapor deposition
Composite material
Materials science
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