Characteristics of amorphous transparent InGaZn6O9 electrodes prepared by RF-magnetron sputtering for fully transparent thin film transistors

Han Jae Shin,Hak-Rin Kim,Do Kyung Lee

Characteristics of amorphous transparent InGaZn6O9 electrodes prepared by RF-magnetron sputtering for fully transparent thin film transistors

2020

Han Jae Shin
Hak-Rin Kim
Do Kyung Lee

We have investigated the properties of InGaZn6O9 thin films fabricated by radio frequency (RF) magnetron sputtering for the application to the electrodes in transparent thin film transistor (TTFT)....

Keywords:

Thin-film transistor
Thin film
Materials science
Radio frequency
radio frequency magnetron sputtering
Electrode
Sputter deposition
Optoelectronics
Amorphous solid

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