Effects of Plasma Cleaning and Assist on Early Stage of Ca-doped Bi2201 Thin Film Growth

Ca-doped Bi2201 thin films were deposited on lattice-mismatched MgO (100) substrate, and effects of oxygen plasma on early stages of the film growth were investigated. Amorphous layer grows first at interface then the 2201 crystal grows on it. However, when the substrate surface is cleaned by the oxygen plasma, the amorphous layer can be reduced then the 2201 crystal grows earlier. The plasma enhances multinucleation of 2201 crystal during the early growth.