Development of a chip-based ingroove microplasma source: Design, characterization, and diagnostics

A chip-based ingroove microplasma source was designed for molecular emission spectrometry by using a space-confined direct current duct in air. The voltage-current characteristics of different size generators, emission spectroscopy of argon were discussed, respectively. It is found that the emission intensity of excited Ar and N2 approaches its maximum near the cathode, while OH and O peaks most likely appear close to the anode. The electron density, electronic excitation temperature, rotational temperature, and vibrational temperature of the argon plasma were also calculated. More importantly, the chip-based ingroove microplasma shows much better stability compared with its counterparts.