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Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
2019
Matthias Kocher
Tobias Erlbacher
Mathias Rommel
Anton J. Bauer
Keywords:
Metallurgy
Materials science
Composite material
Grinding
Bevel
Correction
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