A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs

This paper presents a tri-axis MEMS gyroscope design with novel tetra-pendulum proof masses for X-, Y-axis and regular proof masses for Z-axis rate sensing, which are all coupled with and embedded in a conventional tuning fork driving frame. The four pendulum proof masses are suspended via the torsional springs to a common center anchor and can be driven to swing around the anchor via the tilted transforming springs as the driving frame is oscillated in an anti-phase mode. As an X-, Y-axis angular rate is applied, the tetra-pendulum proof masses will rotate around the torsional springs in pairs for X- and Y-axis differential sensing, respectively. In particular, we investigated the relationship between the tilting angle of the transforming spring and its transforming efficiency, i.e. the amplitude ratio of the pendulum's swing to the driving oscillation, which shows a straight impact on the sensitivity. By theoretical analysis and Ansys simulation, we achieved an optimal tilting angle of 22.5°, which extends along the angular bisector of the pendulum's and driving mass’ moving direction and demonstrates a significant increase in transforming efficiency by about 40%, compared with the trivial tilting angle of 45°. By employing an SOI-based bulk micromachining process, the prototype device with the optimal design of the transforming spring (type I) and that with the trivial design (type II) for reference have been successfully fabricated. As expected, the testing results indicate an increase of more than 20% in the X- and Y- sensitivities, which is mainly from the enhanced sensitive transforming springs.