Highly reliable silicon micromachined physical sensors in mass production
1996
Abstract Silicon micromachined physical sensors such as silicon pressure sensors and accelerometers are now in mass production in response to the strong market demands. In the design of such sensors, it is most important to guarantee high reliability as well as low cost. To respond to these demands for microsensors, the designs of device structure, production processes and packaging have been investigated in detail.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
23
Citations
NaN
KQI