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具自行對準凹陷電極1x4矽質金屬-半導體-金屬光偵測器陣列的特性;Characteristics of 1x4 Si MSM-PD Array With Self-Aligned Trench Electrodes
具自行對準凹陷電極1x4矽質金屬-半導體-金屬光偵測器陣列的特性;Characteristics of 1x4 Si MSM-PD Array With Self-Aligned Trench Electrodes
2001
Laiwei Ren
Wei-Jen Lai
Keywords:
Electrode
Photodetector
Electronic engineering
Materials science
Trench
Optoelectronics
Correction
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