APCVD preparation of TiN x O y film for multi-functional coating glass
2009
A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiN x O y film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
6
References
0
Citations
NaN
KQI