Crack tip strain field sensor and measuring method thereof

The invention discloses a crack tip strain field sensor and a measuring method thereof. The sensor is an array type sensor. A high-sensitivity semiconductor anisotropy thin-film material is used, and strain sensing is achieved through a piezoresistive effect of the material and a modulating effect of piezoelectric charges on interface resistance. A planar electrode arrangement structure of a traditional strain gage is abandoned, and a top and bottom electrode arrangement structure in three-dimensional orthogonality is selected. Thus, miniaturization and high sensitivity of a sensor unit are achieved. Sharing of sensing units on a single thin film is achieved through resistance anisotropy of the semiconductor thin-film sensing material, the structural design and the microprocessing technology of a semiconductor are greatly simplified, and array integrity is improved. The spatial resolution and the strain sensitivity of the sensor are obviously improved through the device structure, and the purpose that field strain measurement adapts to heterogeneous strain measurement of a crack tip is achieved.