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Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation
Real-time study of HWCVD a-Si:H film growth using spectroscopic second harmonic generation
2004
Wmm Erwin Kessels
Imp Igor Aarts
Jjh Joost Gielis
Pmj Piet Grauls
Cm Christian Leewis
van de Mcm Richard Sanden
Keywords:
Nuclear magnetic resonance
Second-harmonic generation
Optoelectronics
Materials science
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