Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing

We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless nickel and gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors.