Preparation of Li2B4O7 thin films by chemical solution decomposition method

Abstract Li 2 B 4 O 7 polycrystalline films on silica glass and Si(111) substrates were prepared by chemical solution decomposition(CSD) method. After spin coating, the wet film was dried at 200 °C, and then annealed at different temperatures to form polycrystalline Li 2 B 4 O 7 film. These annealed films were characterized by using X-ray diffraction (XRD), Fourier transformation infrared spectroscopy (FTIR), transmission electron microscope (TEM) and selective area electron diffraction (SAED). All these results show that the main component of the film is Li 2 B 4 O 7 crystalline phase and the average crystalline size of these films is in the range of 20–50 nm.