An ion source system with a long channel extraction electrode to produce ribbon ion beams

Abstract This paper presents an extraction system with a long channel slit-formed extraction electrode and gives a theoretical calculation, from basic formulae, of the geometric parameters for the extraction system. Some numerical results from these formulae are presented. This extraction system is suitable for an ion source with a small plasma density (10 10 –10 11 ions/cm 3 ) to produce high beam currents with a relatively low gas consumption.