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Observation of Internal Defects in Material using Scanning Electron-induced Acoustic Microscope
Observation of Internal Defects in Material using Scanning Electron-induced Acoustic Microscope
2018
Takuya Higuchi
Yusuke Inoue
Akitoshi Iwata
Atsuhiro Koyama
Fumitaka Motomura
Toru Takase
Keywords:
Scanning electron microscope
Analytical chemistry
Microscope
Materials science
acoustic microscope
Optics
Correction
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