Coupling effect in microscale mechanical test

With the trend of miniaturization of the tested objects, the coupling effect in micro/nano mechanical test among the measurement system, the sample and the test environment becomes an important issue. In this paper, a single cantilever typed probe system is proposed and the coupling effect between the loading probe and the tested samples are investigated. The deformations of the loading probe and the cantilever typed samples, Si and silicon nitride cantilevers, are measured with the experiments and their deformation behaviors are discussed.