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Design of Nanoporous Ultra Low-Dielectric Constant Organosilicates by Self-Assembly
Design of Nanoporous Ultra Low-Dielectric Constant Organosilicates by Self-Assembly
2001
S. Y. Yang
T. L. Dull
J. P. Sun
Albert F. Yee
Peter A. Mirau
Chien-Shing Pai
Omkaram Nalamasu
Elsa Reichmanis
Eric K. Lin
V. J. Lee
David W. Gidley
W. E. Frieze
Keywords:
Small-angle neutron scattering
Dielectric
X-ray reflectivity
Low-k dielectric
Nanoporous
Self-assembly
Inorganic chemistry
Chemistry
Molecular physics
Chemical engineering
porous thin films
Correction
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