Supercritical-Carbon-Dioxide Solubility Characteristics of Polyphenols and Polyphenol Derivatives

Supercritical carbon dioxide (scCO2) solubility characteristics of various polyphenols and their derivatives were investigated for the sake of resist materials for scCO2 development. Some 3 nuclei-polyphenols were fairly soluble in scCO2 at the condition of pressure: 15MPa, temperature: 38 °C. Among various subustituent groups, only carboxylic acid COOH structure was a strong dissolution-inhibition factor, but other polar groups, hydroxyl, carboxylic-acid ester structures, such as methyl, ethyl, ter-butyl esters, were not fatal dissolution-inhibition factors in the films for scCO2. It was presumed that existence of hydrogen bonding interaction in the film strongly affect the film dissolution in scCO2.