Laser system or laser exposure system

2014 
Improve the stability of the output and beam characteristics of the laser beam. Laser exposure system is disposed on the optical path of the plurality of laser beam output and a plurality of laser device that outputs laser light to be irradiated to the irradiated object, from said plurality of laser devices, the plurality of laser light beam at least one beam property adjuster is substantially coincident with each other characteristics, may be provided.
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