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Simulations of sheath-wave interactions controlling low frequency modulation of uniformity in VHF driven plasma sources
Simulations of sheath-wave interactions controlling low frequency modulation of uniformity in VHF driven plasma sources
2019
Toshihiko Iwao
Peter L. G. Ventzek
Jianping Zhao
Rochan Upadhyay
Laxminarayan L. Raja
Keywords:
Plasma
low frequency modulation
Optoelectronics
Materials science
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