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Selective growth of boron-doped polycrystalline diamond thin films
Selective growth of boron-doped polycrystalline diamond thin films
1991
R. Ramesham
T. Roppel
B. F. Hajek
C. Ellis
B.H. Loo
Keywords:
plasma heating
Solid-state physics
polycrystalline diamond
Chemical vapor deposition
Materials science
boron doping
Crystal growth
Thin film
high pressure
Chemical engineering
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