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The project of gas cluster ion source
The project of gas cluster ion source
2007
A. A. Andreev
Yu.A. Ermakov
A. S. Patrakeev
V. S. Chernysh
Keywords:
Charged particle
Cluster (physics)
Ion
Oxygen
Nitrogen
Inorganic chemistry
Argon
Ion source
Materials science
Compounds of carbon
Correction
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