Submicrometer resolution of contact printing by pulsed excimer laser radiation in thin films As2S3

Petersburg, Russia1.INTRODUCTION.There is an opinion about impossibility to achieve very high resolution by contact printing. It isquite correct from the point of view wave optics fundamental relationships. The minimal possibleelement dimension is proportional to square root of mask-to-wafer gap and actinic radiation wavelength.So the decrease of wavelength doesn't give any effect up to soft X-rays. Besides mask-to-wafer gap is