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Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon
Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon
2001
R. Tonini
Federico Corni
Carlo Emanuele Nobili
G. Ottaviani
F. Cazzaniga
G. Queirolo
Keywords:
Ion implantation
Helium
Metallurgy
Hydrogen
Materials science
Silicon
Composite material
Void (astronomy)
Correction
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