Predicting and Comparing Electromigration Failure for Different Test Structures

Electromigration and stress migration are important reliability concerns in the semiconductor industry. Relative and absolute assessments of lifetimes generally rely on the accelerated testing of ‘standard’ test structures. However, the sensitivity to various important electromigration phenomena is found to depend strongly on the type of test structure. Two common structures for electromigration testing are (i) a long line with large pads at either end and (ii) a more realistic interconnect line with W-studs at the line end. The effects of (a) different flux divergences at the line end, (b) interfacial diffusion, and (c) Cu-depletion generally result in different lifetimes for the two types of test structures under the same testing conditions. In this paper, we compare void growth rates and mean times to failure for both types of test structure taking these effects into account. Our results are used to explain differences in MTF values reported in the literature for different test structures.