Spectroscopic study of the reaction of tetramethyldisiloxane with a cold remote nitrogen plasma. Effect of dioxygen addition in the reactive mixture

The interaction of 1,1,3,3-tetramethyldisiloxane with a cold remote nitrogen plasma is studied by visible ultraviolet emission spectroscopy. Evolutions of emissions when dioxygen is added in the remote plasma region are correlated with the previously studied main characteristics of the polymeric deposition. The role of the energy vectors is discussed. New emissions are attributed to the triatomic Si O Si molecule.