Roughness sensor based on a compact optoelectronic emitter-receivermodules

In construction and manufacturing the surface roughness and their control plays a major role. The mechanical test probes are used in many applications, because the advantage of the higher resolution of optical systems often plays no role. But in all cases the measurement systems were uses outside of fabrication processes due to the complex and expensive equipment. To overcome these we developed a roughness sensor suitable for an automated control of machined surfaces. The sensor is able to handle high throughput and parallel systems is due to the low cost available. Our solution is compact stand-alone sensors that can be simple integrated in existing systems like machine tools or transport systems. The sensor is based on a diode laser, focusing optics and a special silicon photo diode array in a stable housing. The single-mode VCSEL at 670 nm emission wavelength is focused on the surface of the sample at distance of 5mm. The light was reflected from the test surface and detected with an 8-channel photodiode array. The position of the main reflex allows an optimization of the sensor distance to the surface. During the movement of the sample with a known velocity roughness depended signals over time were recorded at 8 cannels. This allows a detection of the angular distribution of the scattered light in combination of position dependent refection. It was shown here that we be able to achieve resolution below the spot diameter (30μm FWHM). We verify the sensor capabilities for real world applications on drilled samples with typical roughness variations in micro meter range.