Ion Energy Distribution of 13.56 MHz rf Glow Discharge in a Planar System Cathode

The ion energy distribution of 13.56 MHz rf glow discharges in a cathode has been measured by an ion energy analyzer (IEA). In the cathode, it is necessary to decrease the measurement variation with the rf voltage. The measurement variation could be decreased by increasing the distance between the cathode electrode and the IEA to calculate the motion of ions in the rf electric field. The relationship between the ion energy distribution and the applied rf excitation voltage on the cathode has been investigated in this system. The average ion energy depends on the selfbiased dc voltage. The maximum ion energy depends on the value added to one-half of the peak-to-peak rf excitation voltage and the self-biased dc voltage.